High-Reflectance Silicon Rear Mirrors (Total Reflectors)

High Intra-Cavity Reflectance | Stable Thermal Performance | OEM CO2 Laser Resonator Optics

Technical Specifications

Technical ParameterSpecification
SubstrateOptical Grade Silicon (Si)
Design Wavelength10.6 μm (CO2 Laser)
Reflectance (R)> 99.5% @ 10.6μm
Diameter Tolerance+0.0 / -0.1 mm
Thickness Tolerance±0.1 mm
Thickness Tolerance±0.1 mm
Surface Figure< λ/40 @ 10.6μm
Surface Quality40-20 scratch and dig (Standard)
Clear Aperture> 90%
Chamfer< 0.3±0.2×45°
Coating (Reflective Side)Enhanced Gold (Au) or High-Reflection (HR) Dielectric Coating
Coating (Back Side)Uncoated or Commercial Polish

Product Overview

The Backbone of the Laser Resonator

The Rear Mirror, often referred to as the Total Reflector (TR), sits at the very back of the CO2 laser cavity. Its primary function is to bounce nearly 100% of the oscillating laser energy back through the gain medium, working in tandem with the Output Coupler to sustain stimulated emission. Our silicon rear mirrors are engineered to support efficient intra-cavity feedback and stable resonator performance in industrial CO2 laser systems.

The Silicon Thermal Advantage

Inside a high-power resonant cavity, thermal management is critical. Even a tiny fraction of absorbed energy can warp the mirror surface. We utilize high-purity Optical-Grade Silicon (Si) for our rear mirrors because of its exceptional thermal conductivity and lightweight profile. This allows the mirror to rapidly dissipate heat, completely preventing thermal lensing and structural deformation during 24/7 continuous industrial processing.This helps the mirror dissipate heat efficiently, reducing thermal effects and structural deformation during continuous industrial operation.

Strict Metrology & Global Compliance

Each total reflector can be evaluated with interferometric testing to verify surface figure and support low-scatter resonator performance. Silicon rear mirrors are available for civilian and industrial CO2 laser systems, with custom diameters, coating options, and OEM specifications to support resonator integration and replacement applications.

Metrology & Performance Reports


Figure 1: FTIR Spectrophotometer Reflectance Analysis
Target Wavelength: 10.6 μm | Substrate: Optical Grade Silicon (Si)
The test result demonstrates a reflectance of 99.92% at 10.6 μm, supporting efficient intra-cavity energy feedback and stable resonator performance.

Performance Validation & Metrology Analysis

  • Testing Equipment: Shimadzu FTIR Spectrophotometer
  • Target Wavelength: 10.6 μm (Industrial CO2 Laser)
  • Performance Index: Peak Reflectance (R) = 99.92% @ 10.6μm.
  • Optical Edge: Advanced High-Reflection (HR) coatings maximize energy feedback, while the optical-grade Silicon (Si) substrate provides superior thermal conductivity for rapid heat dissipation.
  • Benefit: Helps reduce thermal distortion and optical losses within the resonant cavity, supporting stable continuous-wave (CW) beam delivery for industrial laser processing applications.

Leverage Our In-House Metrology Capabilities

Struggling with power degradation, cavity mirror thermal damage, or unstable beam profiles? Clarvis Industrial provides end-to-end metrology support, including custom reflectance profiling, thermal stability analysis, and high-LIDT optical coatings. Connect with an expert engineer to finalize your resonator fabrication specs and secure highly reliable cavity optics for your assembly line.

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