UV Fused Silica Windows for Deep-UV Applications

Deep-UV Transmission | Low Thermal Expansion | High-Purity Fused Silica

Technical Specifications

Technical ParameterSpecification
SubstrateUV Grade Fused Silica (JGS1 / Corning 7980 equivalent)
DimensionsCustom (Round, Square, Rectangular, or Stepped Geometries)
Dimensional Tolerance±0.1mm (Standard) / ±0.02mm (High Precision)
Surface Quality40-20 (Standard) to 20-10 Scratch-Dig (Laser Grade)(Precision)
Surface Flatness< λ/4 to λ/10 @ 632.8nm
Parallelism< 3 arc minutes (Standard) / < 10 arc seconds (Precision)
Transmission Range185nm to 2.1µm (Uncoated)
CoatingUncoated, Narrowband UV-AR (e.g., 266nm, 355nm), or Broadband UV-VIS
Clear Aperture> 90% of central dimension

Product Overview

Built for High-Energy UV Systems

Standard glass absorbs UV light and degrades over time. UV fused silica is well suited for optical systems operating in the ultraviolet spectrum.These windows provide durable optical protection for spectrometer optics, fluorescence microscopy sensors, and UV curing systems, while supporting high signal transmission in demanding UV applications.

Low Thermal Expansion, High Stability

In environments involving high-power lasers or rapid temperature fluctuations, optical components must remain dimensionally stable. The low thermal expansion of UV fused silica helps maintain optical alignment and reduce thermally induced aberrations, supporting stable performance in precision metrology applications.

Reliable OEM & Industrial Supply

We support OEM and industrial customers with custom sizes, thicknesses, surface specifications, and coating options for UV fused silica windows. Components can be supplied for integration into analytical, imaging, laser, and automation systems.

Metrology & Performance Reports


Figure 1: UV Fused Silica Window Transmittance
The BBAR-coated fused silica window shows >99.5% average transmittance across the measured UV-to-NIR range, compared with the uncoated JGS1 reference.


Figure 2: Fused Silica Window Surface Flatness
The interferometric result shows a PV flatness of 0.213λ (better than λ/4), supporting controlled wavefront performance in UV laser and analytical optical systems.

Metrology Analysis & Application Fit

  • Target Wavelength: Optimized for Deep-UV (185nm – 300nm) and Near-UV (300nm – 400nm) spectrums, while maintaining excellent visible and near-infrared transmission.
  • Performance Index: High-purity fused silica helps reduce internal scattering and absorption, supporting high optical performance and improved resistance to laser-induced damage in demanding applications.
  • Mechanical Precision: CNC shaping and edge grinding support precise dimensional control and reliable integration with instrument housings or vacuum flanges.
  • Primary Applications: Ideal for UV laser processing, fluorescence spectroscopy, semiconductor wafer inspection, analytical chemistry instrumentation, and medical/biomedical diagnostic equipment.

Custom Sub-Assembly & Engineering Services

Off-the-shelf windows don’t always fit specialized OEM hardware. We specialize in bridging the gap between raw optical components and final instrument assembly. Whether you need custom V-coat Anti-Reflection (AR) coatings tailored to specific Nd:YAG laser harmonics (266nm, 355nm), precision chamfering, or specific surface flatness testing, our technical team is ready to optimize your high-precision systems.

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